Preprint
Oct 2026
Effect of Rapid Thermal Annealing on the Superconductivity of ALD-Grown TiN thin films
Titanium nitride (TiN) is a promising superconducting material for scalable quantum technologies owing to its tunable kinetic inductance and compatibility with CMOS thin-film processing. However, the superconducting performance of atomic-layer-deposited TiN can be degraded by oxygen incorporation, off-stoichiometry, an...
Z. Sadirkhanov, A. Tuigynbek, M. Surendran et al.
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