Open access
Oct 2026
Fourier-Based Characterization of Reflective Surface Topography Using a Heterodyne Optical Profilometer
Optical profilometry based on heterodyne interferometry was used to characterize the lateral surface topography of reflective surfaces with microstructures. A 633 nm laser beam is split into an unshifted object beam and a reference beam that is frequency-shifted by 80 MHz using a traveling-wave acousto-optic modulator....
A. Beltrán-González, G. Martínez-Ponce, Guillermo García-Torales et al.
· Photonics · 0 citations