Micro-featured devices composed of insulating brittle materials such as silicon wafers, silicon dioxide, glass, ceramics, and composites are becoming more and more important in microfluidics, optics, semiconductors, and biomedical equipment as technology advances. Electrochemical discharge machining (ECDM) is a novel,...
Ashish Ranjan, N. Rattan, Ajay Kumar· Journal of Micromechanics an...· 0 citations
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