Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science
Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison and machine-actionable reuse. We present four domain-expert-reviewed JSON Schemas for ALD and ALE experimental and simulation processes. Cura...
Sameer Sadruddin, Eleni Poupaki, Alex Watkins et al.
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