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Author

Andreas Werbrouck

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Preprint Oct 2026

Autocorrelation-based beam shape optimization in scanning electron microscopy

Many automatically focusing algorithms for scanning electron microscopes exist. Typically, these optimize a single derived metric (such as image sharpness) without considering the intrinsic beam shape. We describe an algorithm to automatically focus and stigmate scanning electron microscopes based on the autocorrelatio...

Rebecca Guan, Andreas Werbrouck, Matthew M. Maschmann et al. · 0 citations

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