Advances in Femtosecond Laser Micro-Nano Machining for Optical Microstructure Fabrication
Ultrafast femtosecond lasers feature ultrashort pulses, ultrahigh peak power and cold ablation, and have evolving into a vital precision machining tool in optoelectronic engineering. This paper reviews femtosecond laser fabrication of optical microstructures including microlens arrays, photonic crystals and microgratin...