Calorimetry-assisted analysis of low-temperature Ti2AlN formation in sputtered multilayers
Rapid differential scanning calorimetry (DSC) measurements were performed on Ti, TiN, TiAl, and AlN multilayers that were magnetron sputtered at ambient temperature and had a similar overall composition to MAX-phase Ti2AlN. The DSC yielded thermal scans with exotherms indicating diffusion and crystallization processes...