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H. Noh

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Oct 2026

Advancing sMIM for Industrial Semiconductor Failure Analysis

Scanning Microwave Impedance Microscopy (sMIM) is a powerful technique for nanoscale electrical characterization in semiconductor failure analysis; however, its practical adoption has been limited by spatial resolution constraints, background artifacts from stray capacitance, and complex calibration procedures. This...

H. Noh, Jason Hsieh, Brian Choi et al. · 0 citations

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