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Hai-Xin Zhang

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Conference Oct 2026

Preparation of amorphous gallium oxide films

Amorphous gallium oxide (a-Ga2O3) films were successfully fabricated on Al2O3 substrates via radio frequency (RF) magnetron sputtering under room temperature conditions. The preparation process was systematically optimized, including substrate cleaning, vacuum environment control, and sputtering parameter regulation (1...

Hai-Xin Zhang, Yang Zhao · Conference on Optics and Com... · 0 citations