Continuous-wave laser-based polarization-modulated maskless lithography with parallel meta-atom exposure for millimeter-scale LWIR metalenses.
Long-wave infrared (LWIR) metalenses are important for compact thermal imaging and remote sensing applications, and a rapid, cost-effective, and high-precision fabrication method is highly desirable. Here, we propose polarization-modulated maskless digital lithography based on a continuous-wave (CW) laser and a spatial...