J. Elliott

AI-Driven Super-Resolution Enhancement of Scanning Electron Microscopy Images for Semiconductor Failure Analysis

Scanning electron microscopy (SEM) is central to semiconductor failure analysis (FA), but high-resolution acquisition is slow, and fast survey scans often lack the detail needed to decide where to look closely. We report two results on enhancing low-detail SEM images of static random-access memory (SRAM) arrays. Firs...