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Sponsored Artificial Intelligence: A Modern Approach, Global Edition Artificial Intelligence: A Modern Approach, Global Edition

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J. Rothhardt

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Open access Oct 2026

Quantitative Nanoscale Material Mapping Based on Extreme Ultraviolet Ptychography.

Quantitative, nondestructive characterization of materials at the nanoscale is crucial for the development of advanced energy, electronic, and nanostructured systems. In this context, microscopy based on extreme ultraviolet (EUV) radiation has recently attracted considerable interest, as it combines high spatial resolu...

Leona Licht, W. Eschen, Chang Liu et al. · 0 citations

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