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Author

Jaini Shah

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Preprint Sep 2026

Process-Technology Co-optimization for 2D-FETs

This work presents the first experimental machine learning (ML)enabled Process-Technology Co-Optimization (PTCO) framework for optimizing 2D transition metal dichalcogenide FET fabrication directly from statistically meaningful experimental data rather than pure simulation data, and uncovers hidden process-performance...

Shao-Heng Yang, Jaini Shah, Mayukh Das et al. · 0 citations

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