Jia-Lei Nie

Novel In-situ Metrology Technology for Nanoscale Precision Surface Topography and Error Traceability Analysis

In advanced engineering and precision manufacturing, nanoscale surface topography significantly influences the operational performance, reliability, and service lifespan of high-end components, particularly in microelectronics, aerospace, and MEMS applications. In-situ metrology is a critical technique for real-time mo...