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Sponsored Artificial Intelligence: A Modern Approach, Global Edition Artificial Intelligence: A Modern Approach, Global Edition

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Jin-Zhi Mu

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Nov 2026

Compact All-Metasurface Interferometer for High-Precision Displacement Sensing

Compact and high-precision displacement sensing is a prerequisite for next-generation photolithography and nanomanufacturing. While metasurface-based sensors offer miniaturization, existing solutions inevitably resort to external optical systems of prisms or bulky lens for beam manipulation, hindering full integration...

Wei Chen, Jin-Zhi Mu, Shao-Lin Zhou · 0 citations

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