Review
Open access
Aug 2026
Source-Gated Transistors as BEOL-Compatible Devices for Monolithic 3D Integration: Architectures, Materials, and Spatial Validation
The semiconductor industry faces converging pressures from energy-constrained edge electronics and energy-bottlenecked high-performance computing, motivating heterogeneous monolithic three-dimensional (M3D) integration as a system-level response. M3D imposes a strict back-end-of-line (BEOL) thermal budget on upper-tier...
Sojeong Woo, H. Kim, Siyoung Lee et al.
· Electronics · 0 citations