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Author

Ju Wang

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Open access Oct 2026

Modeling and compensation of periodic nonlinear error in micro-displacement measurement using a reflective-sphere-based low-finesse Fabry-Pérot cavity.

Low-finesse Fabry-Pérot (F-P) cavities are attractive for high-precision micro-displacement measurement (MDM), but residual multiple reflections introduce periodic nonlinear error during quadrature demodulation. In this work, a reflective-sphere-based low-finesse F-P cavity and a model-based periodic nonlinear error co...

Ju Wang, Xiao-Dong Chen, Hao Luo et al. · 0 citations

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