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Sponsored AI AM CLAUDE, A Beginner's Guide: Learn the basics of working with AI AI AM CLAUDE, A Beginner's Guide: Learn the basics of working with AI

Author

Jun-Bo Liu

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2 papers indexed here

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Conference Sep 2026

Design method of a low-angle-of-incidence six-mirror extreme ultraviolet lithography objective system

Extreme ultraviolet lithography (EUVL) objective systems must satisfy multiple constraints. These include high numerical aperture, large field of view, low angle of incidence (AOI), and high image quality. Traditional damped least squares methods are highly dependent on the initial structure and have limited efficiency...

Ming-Qi Ai, Song-Mao Xian, Shi-Yu Li et al. · 0 citations
Conference Sep 2026

Research on noise suppression in phase unwrapping for Ronchi shearing interferometry

Lithography lies at the heart of integrated circuit manufacturing, and its projection lens is a key part that directly determines the device’s resolution through imaging quality. This imaging quality is typically characterized by wavefront aberration, and high-precision measurement of wavefront aberrations is an essent...

Yong-Sheng Hui, Jian-Ke Li, Ji Zhou et al. · 0 citations

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