M. Fueldner

Experimental investigation and modelling on the water ingress protection of laser-structured glass-micromesh chips with cloverleaf-like microstructures

Glass-micromesh chips, produced by a laser-induced deep etching (LIDE) technique, have recently been demonstrated as promising environmental protective components for microelectromechanical system (MEMS)-based microphones, exhibiting minimal adverse impact on their acoustic characteristics and a high capability to filt...