Author

M. Villena

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Preprint Sep 2026

Process-Technology Co-optimization for 2D-FETs

We present the first experimental machine learning (ML)-enabled Process-Technology Co-Optimization (PTCO) framework for optimizing 2D transition metal dichalcogenide (TMD) FET fabrication directly from statistically meaningful experimental data rather than pure simulation data. We first introduce a transition voltage m...

Shao-Heng Yang, Jaini Shah, Mayukh Das et al. · 0 citations