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Sponsored Artificial Intelligence: A Modern Approach, Global Edition Artificial Intelligence: A Modern Approach, Global Edition

Author

M. Ziman

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Open access Sep 2026

Robust SiON rib waveguides for CMOS-compatible surface plasmon resonance sensing of aqueous analytes

Silicon oxynitride (SiON) is a highly adaptable material platform for photonic integrated circuits owing to its refractive index tunability and full CMOS compatibility. In this work, an integrated surface plasmon resonance (SPR) sensor based on a robust SiON rib waveguide is demonstrated. The sensor geometry and moda...

M. Hausner, Martin Feiler, M. Ziman et al. · 0 citations

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