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Manolis Doxastakis

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#diffusion models Oct 2026

Direct Measurements and Analysis of Catalyst Diffusion and Reaction Fronts in Chemically Amplified Resists

Abstract The propagation of both catalyst diffusion and reaction fronts in a polymeric chemically amplified resist (CAR) is evaluated by time-of-flight secondary ion mass spectrometry (TOF-SIMS) depth profiling, and is compared with the propagation of catalyst diffusion fronts in inert resist analogues. We report that...

Christopher M. Bottoms, Tanguy Terlier, Manolis Doxastakis et al. · 0 citations

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