Skip to content

Author

Meng-Kun Tian

2 papers indexed here

We haven’t gathered this author’s papers yet. Follow them and we’ll fetch their work.

Not the right person? Other researchers publish under this name.

Open access Oct 2026

Effects of Deposition Temperature on the Microstructure and Electrical Properties of 50 nm High-k BaTiO3 MIM Capacitors Fabricated by Atomic Layer Deposition

Thermal atomic layer deposition (ALD) of BaTiO3 (BTO) is of interest for next-generation microelectronic devices, including RAM and NAND memory. Herein, we investigate the influence of deposition temperature on the microstructure and electronic properties of 50 nm BTO thin films fabricated by ALD at 200, 220, 240, an...

Jia-Yi Chen, Ze-Kai Wang, Meng-Kun Tian et al. · 0 citations
Sep 2026

Calorimetry-assisted analysis of low-temperature Ti2AlN formation in sputtered multilayers

Rapid differential scanning calorimetry (DSC) measurements were performed on Ti, TiN, TiAl, and AlN multilayers that were magnetron sputtered at ambient temperature and had a similar overall composition to MAX-phase Ti2AlN. The DSC yielded thermal scans with exotherms indicating diffusion and crystallization processes...

Moses O. Nnaji, Meng-Kun Tian, D. Hitchcock et al. · 0 citations

We use cookies to run the site and, with your consent, for analytics and to show ads. See our Cookie Policy.