Preprint
Sep 2026
High-Performance Scaled P-Type SnOx Transistor by Atomic Layer Deposition with CFET Integration
The development of high-performance p-type oxide semiconductors is essential for realizing complementary logic for monolithic 3D integration, yet p-type oxide semiconductors still exhibit substantially inferior performance compared with their n-type counterparts. In this work, we demonstrate high-performance p-type SnO...
Zi-Heng Wang, Wen He, Chen Gu et al.
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