Ming-Yu Xu

Low-Temperature Stabilization of $\delta$-NbN Superconducting Thin Films through Energy-Selective Ion Beam Sputtering

Achieving high-quality superconducting thin films at low temperatures is a central challenge for scalable quantum device integration and Complementary Metal-Oxide-Semiconductor (CMOS)-compatible fabrication. Here, we demonstrate a room-temperature magnetron sputtering approach for synthesizing niobium nitride (NbN) thi...