Modeling and Design of a Diaphragm-Integrated Photonic Waveguide Microphone
Can an integrated optical readout improve the useful operating range of a miniature microphone? We address this question with an analytical model of a diaphragm carrying the sensing arm of a Mach-Zehnder interferometer (MZI). The model links pressure-induced bending to waveguide elongation and then to photocurrent, all...