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R. Wüthrich

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Open access Oct 2026

Angled glass micromachining with a 6DOF spark-assisted chemical engraving system: Error characterization and tool-angle compensation

As a common engineering material, glass possesses several unique properties that make it promising for micro-electro-mechanical systems (MEMS). However, micromachining glass structures is demanding because its hardness and brittleness challenge conventional manufacturing methods. Spark-assisted chemical engraving (SA...

Zhao Zheng, R. Wüthrich · 0 citations

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