Skip to content

Author

René Barczyk

1 paper indexed here

We haven’t gathered this author’s papers yet. Follow them and we’ll fetch their work.

Not the right person? Other researchers publish under this name.

Conference Open access 2026

Inspection and Defect Detection Using Digital Holography for Advanced Packaging

Advanced packaging processes such as hybrid bonding require defect-free surfaces with nanometre-level cleanliness. Conventional bright-field and dark-field inspection struggle on patterned substrates: bright-field contrast is dominated by the nominal pattern, while dark-field is overwhelmed by diffracted orders from pe...

Balasubrahmaniyam Mukundakumar, René Barczyk, Shimpei Matsuura · 0 citations

We use cookies to run the site and, with your consent, for analytics and to show ads. See our Cookie Policy.