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Author

Rong Su

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Open access Oct 2026

Form Measurement of a 300 mm Ellipsoidal Binary Grating Using a Spatio-Temporal Fourier Method

For conventional laser Fizeau phase-shifting interferometry, form measurement of ellipsoidal binary gratings remains challenging because of the discontinuous grating structure with groove depths exceeding half the illumination wavelength. In this study, we propose a spatio-temporal Fourier analysis method that extends...

Hui Xun, Sotero Ordoñes, Rong Su · 0 citations

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