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Author

Seungbum Hong

1 paper indexed here

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Oct 2026

Low-Thermal-Budget High-Mobility In2O3 Thin-Film Transistors Enabled by an In Situ Multifunctional Protection Layer

While atomic layer deposition (ALD)-grown In2O3 thin-film transistors (TFTs) hold great promise for next-generation electronics, the performance and reliability of highly desirable top-gate configurations are often limited by interfacial degradation caused by photolithography chemicals and plasma exposure during devi...

Sunghwan Park, H. Kim, Tae Hwan Boo et al. · 0 citations

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