Preprint
Sep 2026
An Open-Source Hardware and Software Toolkit to Enable Agentic RHEED-Guided Thin-Film Synthesis
Reflection high-energy electron diffraction (RHEED) provides rich information about evolving surfaces during thin-film growth, but non-automated, operator-dependent alignment and fragmented analysis workflows limit its potential in fully autonomous synthesis. Here, we present an open-source hardware and software toolki...
Asraful Haque, Christopher M. Rouleau, Rama K. Vasudevan et al.
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