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Thitiporn Kaewyou

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Open access Sep 2026

Optimization of Oxygen Flow for Tailoring the Properties of AZO Thin Films Deposited by DC Magnetron Sputtering

This study reports on the preparation of aluminum-doped zinc oxide (AZO) thin films by DC magnetron sputtering using a Zn/Al target. The influence of reactive oxygen gas flow rate (10–100 sccm) was investigated while maintaining a constant Ar flow rate of 40 sccm. Films were deposited on both silicon and glass substrat...

Supawan Pansuwan, Thitiporn Kaewyou, P. Somboonsaksri et al. · 0 citations

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