Author

W. Gillijns

3 papers indexed here

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Sep 2026

Synthetic mask layout generation for machine learning-based OPC modeling in NA 0.33 EUV lithography

As NA 0.33 EUV lithography operates increasingly close to fundamental resolution limits, accurate and robust optical proximity correction (OPC) models become critical for advanced logic technology development. In early technology phases, OPC calibration is challenged by limited availability of real product layouts. To...

Ren-Yang Meng, Dong-Bo Xu, Po-Cheng Chen et al. · Photomask Japan · 0 citations

Sep 2026

Direct mask modelling for enhanced OPC accuracy in the era of curvilinear masks

As advanced techniques in Optical Proximity Correction (OPC), such as curvilinear OPC and inverse lithography technology, gain traction in production flows, the accuracy and robustness of compact OPC models become increasingly critical for advanced technology nodes. Traditional mask modeling approaches typically infer...

W. Gillijns, Ren-Yang Meng, B. Baskaran et al. · Photomask Japan · 1 citation

Jul 2026

Physics-Informed Neural Operator for Warm-Starting Background-Decomposed and Preconditioned PSFD: Enabling Scalable 3-D EUV Mask Simulation

We present a physics-informed neural operator (PINO) trained with pseudo-spectral frequency-domain (PSFD) equations for electromagnetic (EM) scattering problems in EUV lithography. The Fourier neural operator is factorized into a two-dimensional lateral ($xy$) branch and a one-dimensional axial ($z$) branch and is trai...

Doyun Kim, W. Gillijns · arXiv.org · 0 citations