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Conference Oct 2026

Surface profile measurement by using a focused-beam optical probe

This paper proposes a novel scanning deflectometry method using a confocal probe based on second harmonic generation (SHG) to achieve both high lateral resolution and a wide angular measurement range. In recent advanced manufacturing, there is an increasing demand for measuring high-curvature optical elements, such as...

R. Sato, Li Chen, Wei Gao · 0 citations

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