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Xiang-Yu Li

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Open access Aug 2026

Adsorptive recovery of <scp> NF <sub>3</sub> </scp> and <scp> CF <sub>4</sub> </scp> using a

Recovering nitrogen trifluoride (NF 3 ) and carbon tetrafluoride (CF 4 ) from semiconductor‐related streams is a process challenge for electronic‐gas reuse and greenhouse‐gas mitigation. Here, we report the efficient NF 3 /CF 4 sieving separation through a flexible one‐dimensional MOF, Mn‐dhbq, that exhibit...

Yan-Lei Zhao, Jiamei Yu, Lu Liu et al. · 0 citations

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