Adsorptive recovery of <scp> NF <sub>3</sub> </scp> and <scp> CF <sub>4</sub> </scp> using a
Recovering nitrogen trifluoride (NF 3 ) and carbon tetrafluoride (CF 4 ) from semiconductor‐related streams is a process challenge for electronic‐gas reuse and greenhouse‐gas mitigation. Here, we report the efficient NF 3 /CF 4 sieving separation through a flexible one‐dimensional MOF, Mn‐dhbq, that exhibit...