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Author

Xun Xue

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Aug 2026

Focal length measurement of large-aperture optical systems based on defocus wavefront sensing.

We present a method for measuring the focal length of large-aperture optical systems based on defocus wavefront sensing. A 4D dynamic interferometer acquires Zernike defocus coefficients at different axial positions, from which the focal length is derived via a simplified expression. The method is validated on three op...

Yong-Qiang Luo, K. E., Xun Xue et al. · 0 citations
Open access Sep 2026

High-Sensitivity Optical Scattering Inspection Method for Nanoscale Morphological Defects on SiC Wafers

Silicon carbide (SiC) has emerged as a critical wide-bandgap semiconductor for power electronics. However, its high optical transmittance and relatively low dielectric contrast impose fundamental limitations on nanoscale defect detection compared with conventional silicon (Si) wafers. In this work, a numerical framewor...

Jia-Qi Hu, Hong-Li Liu, Yi-Hong Huang et al. · 0 citations

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