Non-contact anisotropic roughness estimation with physics-informed unrolled optimization of the Harvey–Shack model
We present a physics-informed deep-learning method for non-contact estimation of an anisotropic-autocorrelation representation and calibrated directional-roughness labels from a single scattering pattern. The anisotropic generalized Harvey–Shack model is reduced via polar expansion to order-by-order Hankel transforms,...