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Conference Aug 2026

Research and System Implementation of Machine Vision-Based Critical Dimension and Overlay Metrology

This paper proposes a machine vision-based method for chip appearance inspection to address issues in chip manufacturing, such as reliance on manual inspection, low efficiency, poor repeatability, and operator-dependent results. The method uses images from an industrial Charge-Coupled Device (CCD) camera and microscope...

Pei-Yi Zhang, Yi-Tian Su, Yi-Die Ye et al. · 0 citations

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