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Code that builds the ALD process parameter database from the scientific literature: corpus retrieval and full-text acquisition, topical screening, extraction of eight process parameters from the complete article text with an open-weight large language model, per-field value selection and a second pass over empty fields...
Code that builds the ALD process parameter database (v2.1) from the scientific literature: corpus retrieval and full-text acquisition, topical screening, extraction of eight process parameters from the complete article text with an open-weight large language model, per-field value selection and a second pass over empty...
A database of atomic layer deposition (ALD) process parameters extracted from the full text of the scientific literature by an open-weight large language model, together with the manually annotated gold standards used to validate the extraction and a provenance table linking each value to a character span in its own so...
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