Aug 2026· International Conference on Optical MEMS and Nanophotonics· pp. 1-2· 0 citations· 14 references
Abstract
We present a compact MEMS-on-fiber multisensor capable of simultaneous pressure and temperature sensing for surgical assistance. The device integrates a micromachined Fabry-Perot membrane for pressure detection and exploits the temperature-dependent bandgap shift of GaAs for thermal sensing. Both modalities are probed through a multimode GRIN fiber, enabling simple alignment and robustness against bending. Experimental results demonstrate a pressure sensitivity of 9.04 nm/mmHg and a temperature sensitivity of 1.38%/°C. The compact, point-wise sensing capability and intrinsic decoupling of pressure and temperature make the platform promising for minimally invasive and MRI-compatible clinical applications.
A high-sensitivity fiber-optic pressure sensor is demonstrated, based on the Vernier effect in a cascaded dual Fabry–Pérot interferometer. The sensor incorporates a 343 μm polarization-maintaining fiber and a single-mode fiber, precisely aligned and secured within a ceramic sleeve to form an air cavity. The Vernier eff...
Yue-Chen Wang, Cheng-Ju Ma, Xin Gong et al.· Journal of Optics· 0 citations
A Vernier effect–based fiber-optic microcavity sensor is proposed for simultaneous temperature and humidity sensing. Using a sensing Fabry–Perot interferometer (FPI) with a UV-adhesive cavity and a reference air-cavity FPI in parallel, the Vernier effect amplifies spectral shifts. The sensor exhibits temperature sensit...
Wen-Wen Qian, Xin-Ying Lu, Shu-Qing Zhang et al.· International Conference on...· 0 citations
Flexible sensors capable of simultaneous temperature and pressure monitoring are highly desirable for electronic skin, wearable devices, and safety monitoring in high-temperature environments. However, existing flexible sensors are often limited by narrow operating temperature ranges, thermally induced signal interfere...
Zhao-Jun Liu, Bo-Gang Liu, Xiao-Long Liu et al.· Microsystems & Nanoengineeri...· 0 citations
A highly sensitive cascaded Fabry–Perot optical fiber sensor for simultaneous measurement of temperature and high pressure is proposed. The sensor comprises a UV glue filled hollow core fiber (HCF) cascaded with an air cavity sealed in a silica capillary tube. The temperature and pressure can be measured simultaneously...
Chuan-Xin Teng, Li-Ying Shi, Yi-Hai Chen et al.· IEEE Transactions on Instrum...· 0 citations
The strain sensors capable of high sensitivity and a wide measurement range in high-temperature environments are in urgent demand across numerous industrial fields. Herein, we propose an ultrahigh-sensitivity high-temperature strain sensor, which can simultaneously obtain temperature and strain signals. The Fabry–Pérot...
Hao-Yan Chai, Jian-Dong Bai, Yu-Jie Han et al.· IEEE Sensors Journal· 0 citations
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