Abstract Modern micro- and nanoscale manufacturing requires traceable multi-scale metrology spanning macroscopic geometries and sub-micrometer features. Singlesensor systems are limited by trade-offs between resolution, speed, and measurement range. This work presents a hybrid platform integrating an optical microscope, laser focus sensor (LFS), and atomic force microscope (AFM) on a six-degrees-of-freedom (6-DOF) nanopositioning stage, enabling inspection within a Ø200mm × 25mm workspace. A multi-stage alignment protocol ensures lateral repeatability through optical-to-mechanical verification, coordinate transformation, and edge-feature cross-correlation. Experiments on a patterned ultra-low expansion (ULE) substrate demonstrate consistent centroid localization between LFS and AFM, with standard deviations below 100nm. Residual discrepancies, attributed to different sensing principles, remain stable over time. The system enables hierarchical inspection through optical guidance, large-area LFS scanning, and targeted AFM analysis, supporting future scalable in-line metrology for semiconductors, micro-optics, and microelectromechanical systems (MEMS) applications.
Compact and high-precision displacement sensing is a prerequisite for next-generation photolithography and nanomanufacturing. While metasurface-based sensors offer miniaturization, existing solutions inevitably resort to external optical systems of prisms or bulky lens for beam manipulation, hindering full integration...
In advanced engineering and precision manufacturing, nanoscale surface topography significantly influences the operational performance, reliability, and service lifespan of high-end components, particularly in microelectronics, aerospace, and MEMS applications. In-situ metrology is a critical technique for real-time mo...
Advanced semiconductor packaging and heterogeneous integration demand 3D surface metrology that combines submicron precision with industrial-scale throughput. However, traditional optical methods are inherently limited by the slow speed of mechanical scanning. To overcome this, we propose a chromatic differential array...
Cai-Hong Huang, De-Ling Kong, Jia Liang et al.· Measurement science and tech...· 0 citations
Microscopic imaging across different spatial scales requires a large travel range, high positioning resolution, flexible observation perspectives, and reliable autofocus capability. To address these challenges, this article proposes a multi-degree-of-freedom (DOF) cross-scale piezoelectric scanning system. Unlike conve...
Jian-Xing Li, Shijng Zhang, Jing-Han Guan et al.· IEEE Transactions on Instrum...· 0 citations
Accurate micro-force detection is essential for micro-operation and biomedical applications. However, conventional techniques, such as atomic force microscopy (AFM), are bulky and spatially demanding. In this study, we presented micro-spring probes fabricated by femtosecond-laser two-photon polymerization for flexi...
Chang-Xu Li, Zhi-Juan Sun, Jia-Yi Wan et al.· Photonic Sensors· 0 citations
Scanning photocurrent microscopy (SPCM) is a powerful technique for probing local optoelectronic phenomena in 2D semiconducting devices. However, commercial setups remain costly, complex and often lack flexibility and adaptability. In this work, we present a home-built SPCM platform built around the retrofitting of a c...
Nuria Jiménez-Arévalo, Dan Zheng, Yong Xie et al.· 0 citations
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