Enhanced Carbon Sputtering and Detection in Helium Plasma: A Comparative Study of Hollow Cathode and Flat Electrode Discharges Under Pressure-Voltage Modulation
Qiu-Yu Zheng
Jun-Jie Li
Yi-Ru Zhou
Zhian Hao
Chen Zhou
X. Lyu
Ying Wang
C. Yuan
Zhong-Xian Zhou
A. Kudryavtsev
Sep 2026 · IEEE Transactions on Plasma Science · Vol 54, pp. 4347-4354 · 0 citations
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