The integration of polydimethylsiloxane (PDMS) microstructures with surface acoustic wave (SAW) devices requires controlled mechanical attachment to piezoelectric substrates, as mechanical boundary conditions directly influence the heating rate through acoustothermal energy dissipation. In this work, we propose a novel...
J. M. Rocha, S. Balashov, I. A. Pereira et al.· Symposium on Microelectronic...· 0 citations
Glass-micromesh chips, produced by a laser-induced deep etching (LIDE) technique, have recently been demonstrated as promising environmental protective components for microelectromechanical system (MEMS)-based microphones, exhibiting minimal adverse impact on their acoustic characteristics and a high capability to filt...
Giovanni Acanfora, Seamus Lilley, F. Oktasendra et al.· npj Soft Matter· 1 citation
Film adhesion is a critical phenomenon that has been thoroughly investigated to improve structural reliability, notably in microelectronics. In this work, Laser Ultrasonics is used to evaluate the bond quality achieved by an original electroadhesion process. More precisely, an electrostatic field is applied to a polyvi...
Meriem Chrifi Alaoui, M. Baher, F. Jenot et al.· e-Journal of Nondestructive...· 0 citations
Reliable femtosecond laser bonding of glass and metal is urgently required for extreme-service optical components, yet severe thermal expansion mismatch and roughness-induced interfacial air gaps severely degrade joint performance. This work systematically investigates plasma behaviors and welding property control in m...
Yin-Zhi Fu, Dong-Han Li, Jin-Lin Luo et al.· Applied Optics· 0 citations
As a common engineering material, glass possesses several unique properties that make it promising for micro-electro-mechanical systems (MEMS). However, micromachining glass structures is demanding because its hardness and brittleness challenge conventional manufacturing methods. Spark-assisted chemical engraving (SA...
Zhao Zheng, R. Wüthrich· Journal of Micromechanics an...· 0 citations
As stretchable electronics advance in functionality and application scope, interconnection technologies have become critical. Devices in wearable and soft-robotic systems require thinness, stretchability, gas permeability, and damage-free bonding conditions. Accordingly, interconnection technologies must exhibit simila...