Open access
Aug 2026
Ensemble attention deep network for imbalanced silicon wafer defect inspection
The proposed ensemble attention convolutional neural network (EACNN) first performs binary defect detection to distinguish between defective and non-defective samples, followed by a dedicated defect-type classification for fine-grained categorization that underscores EACNN’s ability to learn highly discriminative featu...
Uzma Batool, Zahid Iqbal, M. I. Shapiai et al.
· PeerJ Computer Science · 1 citation