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Review Oct 2026

Novel terahertz bolometric detectors using micro/nanoelectromechanical system resonators

Terahertz (THz) detectors based on micro- and nano-electromechanical system (MEMS/NEMS) resonators have emerged as a promising class of uncooled sensors due to their high sensitivity, fast response, and compatibility with microfabrication technologies. In these devices, incident THz radiation induces thermal effect tha...

Kazuhiro Takahashi, Ya Zhang · 0 citations

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