Novel terahertz bolometric detectors using micro/nanoelectromechanical system resonators
Terahertz (THz) detectors based on micro- and nano-electromechanical system (MEMS/NEMS) resonators have emerged as a promising class of uncooled sensors due to their high sensitivity, fast response, and compatibility with microfabrication technologies. In these devices, incident THz radiation induces thermal effect tha...