Novel terahertz bolometric detectors using micro/nanoelectromechanical system resonators

Abstract

Terahertz (THz) detectors based on micro- and nano-electromechanical system (MEMS/NEMS) resonators have emerged as a promising class of uncooled sensors due to their high sensitivity, fast response, and compatibility with microfabrication technologies. In these devices, incident THz radiation induces thermal effect that is transduced into measurable shifts in the resonance frequency of mechanical resonators. Recent advances have significantly improved key performance metrics such as noise-equivalent power (NEP) and response time. As a representative example, our recently developed SOI MEMS bolometer achieves a low NEP of 36 pW/√Hz and a fast thermal response time of ~88 μ s, outperforming conventional uncooled thermal detectors. The device further exhibits broadband sensitivity from 1–270 THz. This talk reviews recent progress in MEMS/NEMS resonator-based THz detectors and discusses remaining challenges and future opportunities for compact, high-performance THz sensing systems for spectroscopy and imaging applications.