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Ye-Xin Pei

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Oct 2026

Die-warp compensation of a visible-pixel MEMS phase light modulator for beam steering at 1550nm

Wavefront quality often dominates throughput of device such as optical cross-connect switch and free-space optical communication. MEMS SLM enables flexible beam routing and steering, however it is known that the deformation of MEMS backbone. Or warp of the die introduces wave aberration due to the reflective nature of...

Yi-Ran Xie, Tian-Yao Zhang, Ye-Xin Pei et al. · 0 citations

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